Development of TSMC's 1.4nm-class manufacturing technology is well underway, the company revealed during the Future of Logic panel during the IEEE International Electron Devices Meeting (IEDM). TSMC also re-emphasized that mass production using its 2nm-class fabrication process is on track for 2025.
TSMC's 1.4nm production node is officially called A14, according to a slide published by Dylan Patel from SemiAnalysis . For now, TSMC has not disclosed when it plans to start high-volume manufacturing (HVM) on A14 and its specifications, but with N2 scheduled for late 2025 and N2P set for late 2026 , it is reasonable to guess that A14 is coming after that (2027 - 2028).
When it comes to features, A14 is unlikely to adopt vertically-stacked complementary field effect transistors (CFETs), although TSMC is exploring the technology . Therefore, A14 will probably rely on the company's 2nd or 3rd generation gate-all-around FETs (GAAFETs) — just like N2 nodes.
Nodes such as N2 and A14 will require system-level co-optimization to really make the difference and enable new levels of performance, power, and features.
What remains to be seen is whether TSMC plans to adopt High-NA EUV lithography tools for its A14 process technology in the 2027 - 2028 timeframe. Given the fact that by that time Intel (and possibly other chipmakers) will have adopted and perfected next-generation EUV litho machines with a 0.55 numerical aperture, it should be fairly easy for the contract maker of chips to use them. However, because High-NA EUV lithography tools halve reticle size, its usage will bring some additional challenges to both chip designers and chipmakers.
Of course, lot may change between now and 2027 - 2028, so we can't make too many assumptions. But it's evident that TSMC's scientists and developers are working on next-gen production nodes.

